FLUID CONVEYANCE SYSTEM

摘要

A fluid conveyance system for thin film material deposition is provided. A first fluid distribution manifold (10) includes an output face (36) that includes a plurality of elongated slots. The plurality of elongated slots, include a source slot and an exhaust slot. A gas source (28a-28c) is in fluid communication with the source slot. The gas source is configured to provide a gas to the output face of the distribution manifold. A gas receiving chamber (29a-29b) is in fluid communication with the exhaust slot. The gas receiving chamber is configured to collect the gas provided to the output face of the distribution manifold through the exhaust slot. A sensor (46) positioned to sense a parameter of the gas traveling from the gas source to the gas receiving chamber. A controller (56), connected in electrical communication with the sensor, is configured to modify an operating parameter of the conveyance system based on data received from the sensor.