WAFER TRANSFERING UNIT AND MULTI-WAFER PROCESSING SYSTEM HAVING THE SAME

摘要

PURPOSE: A substrate transferring unit and a multi substrate processing system with the same are provided to transfer the number of substrates as many as the number of available internal processing spaces, thereby consecutively processing a substrate. CONSTITUTION: Multiple substrate processing chambers(100a,100b,100c) comprise a plurality of internal processing spaces(A, B) partitioned by a partition member(120). A transfer chamber(200) is placed among multiple substrate processing chambers. A substrate transfer unit(300) transfers a substrate to the multiple substrate processing chambers in the transfer chamber. A buffering chamber(400) is placed on one end of the transfer chamber. The buffering chamber is connected to a loadlock chamber(500).