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发明名称
SUBSTRATE INSPECTION APPARATUS
摘要
申请公布号
KR101027473(B1)
申请公布日期
2011.04.06
申请号
KR20080121415
申请日期
2008.12.02
申请人
发明人
分类号
G01N21/88;G02F1/13
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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