| 摘要 |
PROBLEM TO BE SOLVED: To provide a tracking laser gauge interferometer capable of suitably obtaining the rotation angle of a rotating mechanism. SOLUTION: The tracking laser gauge interferometer 1 includes a measurement reference instrument 2 as a first recursive reflector, a target 3 attached to an object to be measured W as a second recursive reflector, its body 4 for guiding the light emitted from a laser light source to the measurement reference instrument 2 and for emitting the light reflected by the measurement reference instrument 2; the rotating mechanism 5 for rotating the body 4 centered around the measurement reference instrument 2; and a control device 6 for controlling the rotating mechanism 5. The body 4 is provided with a two-dimensional PSD for receiving the light reflected by the measurement reference instrument 2 and detecting the position of the light received. The control device 6 is provided with an angle acquiring portion 63 for acquiring the rotating angle of the rotating mechanism 5 and an angle correction portion 64 for correcting the rotation angle of the rotating mechanism 5, acquired by the angle acquiring portion 63 based on the position of the light detected by the two-dimensional PSD. COPYRIGHT: (C)2011,JPO&INPIT |
