摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a surface electrode film of high quality and a back surface electrode film of high quality, when a reflecting layer is configured by a white material layer, while suppressing the energy and facility investment to be as low as possible. <P>SOLUTION: In a thin-film solar module including a transparent substrate 1; a doped zinc oxide surface electrode film 2 vapor-deposited on the transparent substrate 1; a semiconductor film 3; a doped zinc oxide back surface electrode film 4 provided arbitrarily; and a reflecting layer 5 provided on the back surface on a side opposite to an incidence side hv of light, an amount of dopant of the doped zinc oxide surface electrode film 2 and/or the doped zinc oxide back surface electrode film 4 is reduced from the transparent substrate 1, as going toward the semiconductor film 3 and from the semiconductor film 3 going toward the reflecting layer 5, respectively. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |