RINSING COMPOSITION OF SUBSTRATE FOR MANUFACTURING FLAT PANEL DISPLAY DEVICE

摘要

PURPOSE: A cleaning solution composition is provided to ensure excellent removing power of the contamination caused by organic materials or particles generated on a substrate during a manufacturing process of a flat panel display(FPD), and excellent corrosion resistance of a metal interconnect formed on a substrate. CONSTITUTION: An aqueous cleaning solution composition comprises one or more kinds of compounds selected from 0.01-20 weight% of a boric acid derivative, 0.01-20 weight% of an organic phosphoric acid and salts thereof, used for cleaning the surface of a substrate during a manufacturing process of a flat panel display(FPD). The aqueous cleaning solution composition contains a large amount of deionized water and thus can be easily handled and is environmentally advantageous.