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发明名称
摘要
申请公布号
JP2011505064(A)
申请公布日期
2011.02.17
申请号
JP20100534503
申请日期
2008.11.26
申请人
发明人
分类号
H01L29/812;H01L21/3065;H01L21/338;H01L29/778
主分类号
H01L29/812
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代理人
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