| 发明名称 |
NOVEL RESINS AND PHOTORESIST COMPOSITIONS COMPRISING SAME |
| 摘要 |
Provided are new resins that comprise lactone units and photoresist compositions that comprise such resins. |
| 申请公布号 |
US2011039210(A1) |
申请公布日期 |
2011.02.17 |
| 申请号 |
US20100782528 |
申请日期 |
2010.05.18 |
| 申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS LLC |
发明人 |
XU CHENG-BAI;ZAMPINI ANTHONY |
| 分类号 |
G03F7/004;C08F224/00;G03F7/20 |
主分类号 |
G03F7/004 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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