发明名称 |
CHEMICAL MECHANICAL POLISHING PAD AND FABRICATION METHODE OF THE SAME |
摘要 |
PURPOSE: A CMP(Chemical Mechanical Polishing) pad and a manufacturing method thereof are provided to efficiently form a hole having the diameter of a particular size on a CMP pad by selecting the laser beam wavelength and light absorbent. CONSTITUTION: The diameter of a hole to be formed on a polishing pad is determined according to the kind of CMP process and the kind of polished material(102). The appropriate wavelength band of a laser beam(106) and specific kind of the laser are determined according to the decided diameter of the hole. The light absorbent which can absorb the light of the wavelength band is determined according to the determined wavelength of the laser beam.
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申请公布号 |
KR20110012293(A) |
申请公布日期 |
2011.02.09 |
申请号 |
KR20090069960 |
申请日期 |
2009.07.30 |
申请人 |
INDUSTRY-UNIVERSITY COOPERATION FOUNDATION SOGANGUNIVERSITY |
发明人 |
KIM, CHIL MIN |
分类号 |
H01L21/304 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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