| 摘要 |
The present invention provides a vacuum deposition apparatus configured to simultaneously form a power collecting lead forming portion and an electrode active material portion of a lithium-ion secondary battery and having excellent mass productivity. With shutters 12a and 12b closed, a substrate 4 winding around a first roll 3 is unroll to be conveyed to a second roll 8, and the substrate 4 stops when it reaches first and second deposition possible regions 60a and 60b. Here, the shutter 12a opens, and a deposition material in a crucible of an evaporation source 9 is evaporated to be supplied to a surface of the substrate 4 which is located in the first deposition possible region 60a. With this, a first layer is formed as a deposited film on the surface of the substrate 4. After the deposition is carried out with respect to the substrate 4 for a predetermined period of time, the shutter 12a is closed. Next, the substrate 4 is again conveyed and stops when the portion on which the deposition has been carried out in the first deposition possible region 60a has reached the second deposition possible region 60b. The shutters 12a and 12b open, and the deposition is carried out again. Thus, the first layer is formed in the first deposition possible region 60a, and the second layer having a different growth direction from the first layer is formed as the deposited film on the first layer in the second deposition possible region 60b.
|
