| 发明名称 |
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE MEDIUM |
| 摘要 |
PURPOSE: A liquid processing device, a liquid processing method thereof, and a storage media thereof are provided to prevent the collapse of a convex part by controlling the surface tension between heterogeneous membranes and between a heterogeneous membrane and an inorganic film. CONSTITUTION: A support part supports the main body part of an object(W). A liquid supply device(10) supplies a liquid solution to the object. A hydrophobic liquid supply device(30) supplies a hydrophobic liquid to the object. A rinse fluid supply part(22) supplies a rinse liquid to the object. A substitution liquid supply part(27) supplies a substitution liquid to the object.
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| 申请公布号 |
KR20110000504(A) |
申请公布日期 |
2011.01.03 |
| 申请号 |
KR20100059039 |
申请日期 |
2010.06.22 |
| 申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
NAKAMORI MITSUNORI;FUJITA AKIRA;TOSHIMA TAKAYUKI |
| 分类号 |
H01L21/304;C23F4/00;H01L21/306;H01L21/308 |
主分类号 |
H01L21/304 |
| 代理机构 |
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