| 摘要 |
PURPOSE: A substrate processing device, a substrate processing method, and a computer-readable storing medium are provided to reduce the manufacturing cost by reducing the amount of deionized water in use by recycling the drainage discharged from a treating part. CONSTITUTION: A processing unit(10) processes a substrate(W). The processing unit comprises a treatment bath(12) accepting a wafer and an overflow bath portion(14). A processing solution supply part(30) supplies the processing liquid to the processing unit. A first liquid chemical supplier supplies the first chemical to the processing unit. |
