| 摘要 |
PROBLEM TO BE SOLVED: To detect a shape defect projecting on a boundary part between each front/rear surface and a chamfered part, forming an end face relating to a disk member. SOLUTION: The shape inspection device is described in such a way that a measuring portion P on a disk substrate 1 is irradiated with light, at each different irradiation angle successively from a plurality of LEDs 12, arranged at a plurality of positions respectively on one plane; each image of reflected light from the measuring portion P is imaged by cameras 20R, 20L by a computer 30 in each irradiation; further, a distribution of surface angles on the measuring portion P is calculated, based on an imaged image corresponding to each LED 12 and an irradiation angleϕof light by the computer 30; the quality of the surface shape is discriminated, by discriminating whether a change of the surface angle lies within tolerance; and an image of the surface shape is displayed on an image display device, while expressing clearly a shape defective part. COPYRIGHT: (C)2011,JPO&INPIT
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