| 摘要 |
A micro-electromechanical nozzle arrangement for an inkjet printhead includes a substrate defining an inverted pyramidal ink chamber with a vertex thereof terminating at an ink supply channel defined by the substrate, said substrate having a layer of CMOS drive circuitry; a roof structure connected to the drive circuitry layer and covering the ink chamber, the roof structure defining a fluid ejection nozzle rim above said chamber; a plurality of actuators fast with and displaceable with respect to the roof structure, the actuators radially spaced about the nozzle rim between the guide rails, each actuator having a serpentine heater element configured to expand thermally upon receiving current from the drive circuitry thereby moving said actuators into the chamber and increasing a fluid pressure inside the chamber to eject a drop of ink via the ejection nozzle, wherein each actuator is cantilevered to a heater element in a bendable manner; and a central arm which having metal and PTFE portions to provide structural support for the actuators.
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