FILM FORMING APPARATUS, FILM FORMING SYSTEM, FILM FORMING METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE OR ORGANIC ELECTROLUMINESCENCE ELEMENT,申请号KR20087008125-传众专利搜索

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发明名称	FILM FORMING APPARATUS, FILM FORMING SYSTEM, FILM FORMING METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE OR ORGANIC ELECTROLUMINESCENCE ELEMENT
摘要
申请公布号	KR100990060(B1)	申请公布日期	2010.10.29
申请号	KR20087008125	申请日期	2006.09.05
申请人		发明人
分类号	H01L21/20	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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