| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron gun capable of obtaining an electron beam with high luminance and high stability used for an electron beam and an electron beam apparatus or a vacuum tube, especially, electronic optical apparatuses such as an electron microscope and an electron beam drawing apparatus. <P>SOLUTION: The electron gun is used for electronic optical apparatuses and its electron emitting portion is made of diamond, while solving the above problem, wherein a total amount of electron emitting current of the gun is 50μA or less, a current of electron emission within a solid angle region of 0.0002 sr is 0.025% or more of the total amount of electron emitting current. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
