发明名称 METHOD FOR FABRICATING SEMICONDUCTOR DEVICE HAVING LOW CONTACT RESISTANCE
摘要 Disclosed herein is a method for forming a semiconductor device capable of reducing contact resistance in a highly integrated semiconductor device. The semiconductor device according to an exemplary embodiment of the invention includes an active region defined by an isolation film, the active region having porous regions therein, and gate patterns formed over the active region.
申请公布号 US2010258859(A1) 申请公布日期 2010.10.14
申请号 US20090495704 申请日期 2009.06.30
申请人 HYNIX SEMICONDUCTOR INC. 发明人 PARK HYUNG JIN
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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