摘要 |
PROBLEM TO BE SOLVED: To provide an activated getter surface without performing heating in order to suppress adverse influence on a device and a package. SOLUTION: The package 4 for vacuum includes a container body 4a to be used by evacuating the inside into vacuum and the gas adsorption element 3a disposed inside the container body 4a and composed by exposing the broken surface of a metallic body containing a getter material. The broken surface of the gas adsorption element 3a is obtained by breaking the metallic body containing the getter material. COPYRIGHT: (C)2011,JPO&INPIT
|