发明名称 SEMICONDUCTOR ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor element in which an Sb-based crystal of high quality is grown on an Si substrate. <P>SOLUTION: The semiconductor element includes a first layer 12 which is provided on the Si substrate 11, and contains Sb and a V-group element other than Sb and has a film thickness of 1 to 200 nm, and a second layer 13 which is provided on the first layer and contains Sb. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010225870(A) 申请公布日期 2010.10.07
申请号 JP20090071695 申请日期 2009.03.24
申请人 TOSHIBA CORP 发明人 ZAIMA KOTARO;HASHIMOTO REI;EZAKI ZUISEN;NISHIOKA MASAO;ARAKAWA YASUHIKO
分类号 H01S5/323;H01L21/205;H01L21/338;H01L29/778;H01L29/812;H01L31/10;H01L33/30 主分类号 H01S5/323
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