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发明名称
KORREKTUREINRICHTUNG ZUR KOMPENSATION VON STÖRUNGEN DER POLARISATIONSVERTEILUNG SOWIE PROJEKTIONSOBJEKTIV FÜR DIE MIKROLITHOGRAPHIE
摘要
申请公布号
DE502004011557(D1)
申请公布日期
2010.09.30
申请号
DE200450011557T
申请日期
2004.06.17
申请人
CARL ZEISS SMT AG
发明人
HEMBD, CHRISTIAN
分类号
G02B5/30;G02B13/14;G02B17/08;G02B27/00;G02B27/28;G03F7/20
主分类号
G02B5/30
代理机构
代理人
主权项
地址
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