发明名称 LIQUID CRYSTAL DISPLAY PANEL AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a liquid crystal display panel including a top-gate TFT as a switching element and a light shielding film shielding the TFT from light, which prevents disappearance of the light shielding film due to over-etching even when Mo is used as a material of the light shielding film and a coating insulating layer of the light shielding film is dry-etched to expose a surface of Mo. SOLUTION: In the liquid crystal display panel 1, a light shielding film 11 includes Mo, and the light shielding film 11 and upper layer metal wiring are electrically connected via a first conductive member 25 which is electrically connected to the light shielding film 11 via a first contact hole 27 piercing a buffer insulating film 12 and a gate insulating film 14 and is covered with an interlayer dielectric 16, and a second conductive member 26 which is electrically connected to metal wiring on a surface of the interlayer dielectric 16 via a second contact hole 28 piercing the interlayer dielectric 16. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010210732(A) 申请公布日期 2010.09.24
申请号 JP20090054561 申请日期 2009.03.09
申请人 SONY CORP 发明人 ISHIDA SATOSHI
分类号 G02F1/1368;G09F9/30;H01L21/336;H01L21/768;H01L29/786 主分类号 G02F1/1368
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