FLOW RATE SETTING METHOD AND COATING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide the flow rate setting method for a coating apparatus that easily manages the flow of a coating liquid delivered from each nozzle, and the coating apparatus therefor. SOLUTION: The method includes setting the flow rate of a coating liquid in a coating apparatus that delivers a coating liquid from nozzles each connected to branches such that the coating liquid supplied through a main pipe from a single supply resource is shunted to a plurality of branches, and the coating liquid flows that are fluctuated in the branches are measured by a branch flow measuring means provided individually at the branches. The flow rate setting method includes an in-series supply step and a flow measurement control step. The in-series supply step is such that the branch flow measuring means are each connected in series, and the coating liquid is supplied to the branch flow measuring means connected in series from the supply source and the supplied coating liquid is delivered from one nozzle. The flow measuring control step is such that the measurement results of individual coating liquid flows are controlled in the branch flow measuring means under the condition that the coating liquid is supplied to the branch flow measuring means where the in-series supply steps are connected in series. COPYRIGHT: (C)2010,JPO&INPIT