发明名称 SADDLE FIN TRANSISOR HAVING ELEVATED LANDING PLUG CONTACT AND MANUFACTURING METHOD OF THE SAME
摘要 <p>PURPOSE: A saddle-fin type transistor and a method for forming the same are provided to prevent the generation of short-circuit between a landing plug contact and a recess gate in an element isolation film by forming the landing plug contact into an elevated shape. CONSTITUTION: The active region(102) of a semiconductor substrate(100) is defined by an element isolation film(106). The active region is formed into a saddle-fin type structure. The saddle-fin type structure is protruded to be higher than the element isolation film. A gate(132) includes a poly silicone pattern(126), a conductive pattern(128), and a hard mask layer pattern(130). A gate spacer(134) is formed on the sidewall of the gate.</p>
申请公布号 KR20100098899(A) 申请公布日期 2010.09.10
申请号 KR20090017600 申请日期 2009.03.02
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KIM, KYU TAE
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
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