METHOD OF CUTTING BRITTLE MATERIAL AND METHOD OF MANUFACTURING FLAT PANEL DISPLAY USING THE CUTTING METHOD

摘要

PROBLEM TO BE SOLVED: To achieve a stable cutting process while maintaining a sufficient laser moving speed, in the cutting method using a laser beam.

SOLUTION: The method of cutting a substrate composed of a brittle material by irradiating it with a laser beam includes: a process of heating the substrate by irradiating it with a laser beam; a process of cooling the irradiated region; a process of linearly scanning the irradiated region and the cooled region; and a process of pressurizing a force to a part of the irradiated and cooled regions. The method is characterized in that a difference T(s) between the irradiating time and the cooling time is expressed by T=vS(0.1t-h)/kP, where P (W) is a laser output; v (mm/s) is a laser beam moving speed; S (mm2) is a laser beam irradiation area; t (mm) is a substrate thickness; and k and h are coefficients.

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