发明名称 PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY
摘要 An optical system includes an optical element having adjusting elements. The optical element is connected to a rotatable carrying ring via at least one connecting member arranged on the carrying ring directly or via one or a plurality of intermediate elements to the optical element. The rotatable carrying ring is borne in a manner freely rotatable about an axis relative to a fixed outer mount or the optical element via a rotating device. The outer mount, the rotatable carrying ring and the connecting members are constructed as rotatable kinematics in the form of parallel kinematics.
申请公布号 US2010201964(A1) 申请公布日期 2010.08.12
申请号 US20100724496 申请日期 2010.03.16
申请人 CARL ZEISS SMT AG 发明人 KUGLER JENS;SCHWERTNER TILMAN
分类号 G03B27/54;G02B7/02 主分类号 G03B27/54
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