发明名称 SELF-ALIGNED COIL PROCESS IN MAGNETIC RECORDING HEADS
摘要 In one embodiment of the present invention, a write head includes a first pole P1, a P1 pedestal, a first back gap layer plated on top of the first pole P1 leaving a region between the P1 pedestal and the first back gap layer for plating a coil, a first insulation layer applied on top of the P1 pedestal and the first back gap layer and the region between the P1 pedestal and the first back gap layer. The write head further includes a coil, patterned at least partially on top of the P1 pedestal and the first back gap layer and the region between the P1 pedestal and the first back gap layer, copper plated in the coil patterns, and a second insulation layer applied to fill the spaces in between the coil turns. The resulting structure is planarized via chemical mechanical polishing.
申请公布号 US2010187199(A1) 申请公布日期 2010.07.29
申请号 US20100753620 申请日期 2010.04.02
申请人 HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS B.V. 发明人 LAM TERENCE TIN-LOK;LEE DAVID KAIMON;LEE EDWARD HIN PONG;SHI CHANGQING
分类号 G11B5/187;A62C2/00;A62D1/00;B44C1/22;G11B5/17;G11B5/31;G11B5/39;H01F41/04 主分类号 G11B5/187
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