| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aligner which is advantageous in terms of safety, with respect to the aligner configured to expose a substrate. <P>SOLUTION: The aligner configured to expose the substrate (1) includes an aligner body (12), units (13, 14) which is provided on the aligner body (12) and can open and close openings (23, 24), authentication means (15, 16) which permits the units (13, 14) to open and close, and a control means (10) which inhibits some of operations for a period from when the authentication means (15, 16) permit the units to open until when the authentication means (15, 16) permit the units to close. <P>COPYRIGHT: (C)2010,JPO&INPIT |
