发明名称 APPARATUS FOR PRODUCING COMPOUND SEMICONDUCTOR SINGLE CRYSTAL AND METHOD FOR PRODUCTION THEREOF
摘要 PROBLEM TO BE SOLVED: To provide an apparatus for producing a compound semiconductor single crystal which is high in the yield of single crystallization by decreasing the temperature fluctuations in a horizontal direction of a crucible and its production method. SOLUTION: The apparatus comprises the crucible for containing at least compound semiconductor raw material 5 and a heater 3, 4 for heating and melting the raw material 5 in the crucible in a high-pressure vessel 1 and produces the compound semiconductor single crystal by gradually cooling and solidifying the raw material melt subjected to heating and melting from the lower part or the upper part of the melt. The heater 3, 4 regulated in the bore (D) of the heater 3, 4 to 1.5-3.0 times (D/d=1.5-3.0) with respect to the bore (d) of the crucible is used. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010150136(A) 申请公布日期 2010.07.08
申请号 JP20100049492 申请日期 2010.03.05
申请人 NIPPON MINING & METALS CO LTD 发明人 ASAHI TOSHIAKI;NOZAKI TATSUYA;SATO KENJI
分类号 C30B11/00 主分类号 C30B11/00
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