| 摘要 |
PURPOSE: An ultra high sensitive gas sensor using oxide semiconductor nanofiber and a manufacturing method thereof are provided to utilize an ubiquitous sensor system for next generation and an environment monitoring system by providing an oxide semiconductor nanofiber gas sensor of a good property. CONSTITUTION: An ultra high sensitive gas sensor(100) using oxide semiconductor nanofiber comprises an insulating substrate(110), a metal electrode(120), and a metal oxide semiconductor nano fiber layer. The metal electrode is formed on the insulating substrate. The metal oxide semiconductor nano fiber layer is covered with nano particles with a high sensitivity formed at the upper part of the metal electrode. The insulating substrate comprises an oxide single crystal substrate, a ceramic substrate, a silicon substrate or a glass substrate on which an insulating layer is formed. The metal electrode includes Pt, Pd, Ag, Au, Ni, Ti, Cr, Al, Cu, Sn, Mo, Ru or In. The nano particles covered on the nano fiber layer comprise metal oxide particles or metal catalyst particles of nano size which have high sensitivity to special gas.
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