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发明名称
POSITIONSMESSGERÄT UND VERFAHREN ZUR BESTIMMUNG EINER POSITION
摘要
申请公布号
DE50115461(D1)
申请公布日期
2010.06.10
申请号
DE20015015461
申请日期
2001.09.15
申请人
DR. JOHANNES HEIDENHAIN GMBH
发明人
HUBER-LENK, HERBERT;DRESCHER, JOERG;HAUSSCHMID, MATHIAS;REITER, HERBERT;STREITWIESER, JOHANN;HOLZAPFEL, WOLFGANG
分类号
G01B21/00;G01D5/244;G01D5/245;G03F7/20;G03F9/00;H01L21/027
主分类号
G01B21/00
代理机构
代理人
主权项
地址
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