发明名称 |
METHOD FOR PRODUCING COLOR FILTER, COLOR FILTER, LIQUID CRYSTAL DISPLAY DEVICE AND PRODUCING APPARATUS |
摘要 |
Exfoliation of an etching stopper is prevented. A color filter of the present invention includes an inorganic protection film (etching stopper) composed mainly of SnO2. Since the inorganic protection film as such not only has a high specific resistance but also has a linear expansion coefficient close to the linear expansion coefficient of a transparent electrode, the inorganic protection film is not exfoliated from the transparent electrode or the resin layer even if an object to be processed is heated. Since the inorganic protection film and the transparent electrode can be formed in the same film forming chamber, the time required to produce the color filter can be shortened as compared to in the conventional technique.
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申请公布号 |
US2010141878(A1) |
申请公布日期 |
2010.06.10 |
申请号 |
US20100705049 |
申请日期 |
2010.02.12 |
申请人 |
ULVAC, INC. |
发明人 |
TAKAHASHI HIROHISA;SUGIURA ISAO;OHTA ATSUSHI;ISHIBASHI SATORU |
分类号 |
G02F1/1335;B29D11/00;C23C14/34;G02B5/22 |
主分类号 |
G02F1/1335 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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