| 摘要 |
PURPOSE: A substrate transfer device and a substrate processing device including the same are provided to prevent are provided to prevent overload on a transfer arm by operating the transfer arm once for first and second substrates. CONSTITUTION: A plurality of transfer rollers(300) is arranged in parallel and transfers a first substrate in a horizontal direction. A support unit(400) is positioned on the upper side of the part to receive the first substrate from the transferring rollers and supports the second substrate. A lifting unit(500) is combined with the support unit, vertically moves the support unit to support the second substrate and loads and unloads the second substrate on the transfer rollers. The support unit includes a support stand and a plurality of support pins.
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