发明名称 |
MASTER TEMPLATE REPLICATION |
摘要 |
<p>Systems and methods for providing multiple replicas from a master template are described. Replicas may be formed having a mesa. In one embodiment, a dummy fill region may be included on master template and/or replicas.</p> |
申请公布号 |
WO2010051023(A1) |
申请公布日期 |
2010.05.06 |
申请号 |
WO2009US05868 |
申请日期 |
2009.10.29 |
申请人 |
MOLECULAR IMPRINTS, INC. |
发明人 |
MILLER, MICHAEL N.;BROOKS, CYNTHIA B.;BROWN, LAURA ANNE;SCHMID, GERARD |
分类号 |
G03F7/00;G11B7/00 |
主分类号 |
G03F7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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