发明名称 |
Method and device for examining a surface of an object |
摘要 |
A method for treating a surface of an object and a device suitable in particular for performing this method provide for examining the surface of the object with the aid of a particle beam to counteract the charge buildup on the object. A gas is supplied to convey the charge away from the surface and/or to neutralize it.
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申请公布号 |
US2010102223(A1) |
申请公布日期 |
2010.04.29 |
申请号 |
US20090460166 |
申请日期 |
2009.07.14 |
申请人 |
ALBIEZ MICHAEL;BUHLER WOLFRAM |
发明人 |
ALBIEZ MICHAEL;BUHLER WOLFRAM |
分类号 |
G01N23/00 |
主分类号 |
G01N23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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