| 摘要 |
<P>PROBLEM TO BE SOLVED: To attain reduction in the occupied area and a short-time formation of a processing, by opening and closing the opening of a container by an outermost periphery inductive wall. Ž<P>SOLUTION: A container 1A, a rotation-holding mechanism 7, a process liquid discharge arm 30, inductive walls 16, 17, and air cylinders 22, 23 are provided in a rotary processing unit 1. The rotation-holding mechanism 7 horizontally holds and rotates a substrate 3 to be treated which is carried in from an opening 37 of the container 1A. The inductive walls 16, 17 are arranged concentrically, at the perimeter side of the rotation holding mechanism 7, and discriminate and abandon the waste liquid of process liquid discharged from the process liquid discharge arm 30. The air cylinders 22, 23 are raised and fallen between a recovery position, in which an upper portion of each of the inductive walls 16, 17 is positioned at a part which is positioned at a section higher than the substrate 3 to be treated which is held by the rotation-holding mechanism; and an evacuation position in which the upper portion of each of the inductive walls 16, 17 is positioned at a section which is located lower than the substrate to be treated. The outermost periphery inductive wall 17 from among the inductive walls closes the opening 37 at a recovery position and opens the opening 37 at an evacuation position. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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