发明名称 |
Soft Mems |
摘要 |
A microscale polymer-based apparatus comprises a substrate formed from a first polymer material and at least one active region integrated with the substrate. The at least one active region is patterned from a second polymer material that is modified to perform at least one function within the at least one active region.
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申请公布号 |
US2010072565(A1) |
申请公布日期 |
2010.03.25 |
申请号 |
US20070809757 |
申请日期 |
2007.06.01 |
申请人 |
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS |
发明人 |
LIU CHANG;ENGEL JONATHAN;RYU KEE |
分类号 |
H01L29/84;B29C67/24;B81C99/00 |
主分类号 |
H01L29/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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