FILM FORMATION APPARATUS, SUBSTRATE PROCESSING APPARATUS, FILM FORMATION METHOD AND COMPUTER-READABLE RECORDING MEDIUM

摘要

PURPOSE: An apparatus and a method for forming a film, a substrate process apparatus and a computer-readable storage media are provided to reduce a detection error of the rotation position of a rotating table using a position detection unit. CONSTITUTION: An apparatus for forming a film includes a rotating table(2), a first reaction gas supply unit, a second reaction gas supply unit, a first separation gas supply unit, a position detection unit and an area to be detected(25). A recess part is formed on the surface of the rotating table. A substrate is loaded on the rotating table. The rotation position of the rotating table is detected by the position detection unit. The area to be detected is arranged in the peripheral of the rotating table.