| 摘要 |
PURPOSE:To ensure the accurate detection for the focused position, by providing an invisible light reflecting film on the lower surface of a cover glass on a sample and detecting the deflection of the reflected light given from the reflecting film. CONSTITUTION:An infrared light reflecting film 9 is provided on the lower surface of a cover glass 6. The light given from an infrared light source 1' is made incident to a photodetecting element 4 via pinhole diaphragm 10, a sample 6 and an infrared light pass filter 11. The sample 6 is irradiated from the lower part by the observing light 12. As a result, the infrared light that is sent from a pinhole P of the diaphragm 10 is formed into an image P' on the film 9 through an image forming lens 2 when an objective lens 5 is at the focused position. The infrared light sent from the image P', i.e. the infrared light reflected from the film 9 is formed into an image P'' on the element 4 through an image forming lens 3. |
