SUBSTRATE TRANSPORTATION DEVICE

摘要

PURPOSE: A device for transferring a substrate is provided to prevent a stain on a process layer from generating by reducing the heat-transfer differences between a transfer roller and the substrate. CONSTITUTION: A transfer roller(50) is supported by a rotary shaft(51) The transfer roller is rotatable to the direction of a substrate transfer. One end(50b) of the transfer roller is connected and fixed to an adjacent roller unit(52). A driving part drives the rotary shaft. The outer surface of the transfer roller is a concavo-convex shape.