| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reference sensor with improved stability in time and temperature. <P>SOLUTION: The sensor includes a semiconductor body having a top surface and a bottom surface, a first doped surface oriented region of a first conductivity type at the top surface, and a second doped surface oriented region of an opposite second conductivity type at the bottom surface, wherein a sensitive area is defined in a way that a first region overlaps with a second region. A resistive layer is partially arranged in the sensitive area. The sensor includes two first contact electrodes and two second contact electrodes, wherein the first contact electrodes are placed on the resistive layer to define a first detection area in the sensitive area between the first contact electrodes, and the second contact electrodes are placed partially in the sensitive area on the bottom surface of the body, and the surfaces of the second electrodes in the sensitive area define a second detection area that overlaps with the first detection area. <P>COPYRIGHT: (C)2010,JPO&INPIT |
