| 摘要 |
PROBLEM TO BE SOLVED: To perform electrical inspection of an inspection object, and to inspect deformation of the inspection object simultaneously. SOLUTION: A wire is wound on a sleeve 2 to cover a part or the whole of a range where a boundary part between a tip part 1a and a small diameter part 1b is moved by displacement of a probe pin 1, to thereby provide a coil 4. Since an inductance of the coil 4 is changed corresponding to movement of the boundary part between the tip part 1a and the small diameter part 1b of the probe pin 1, a displacement output is changed corresponding to displacement of the probe pin 1. Namely, the displacement of the probe pin 1 can be known by viewing the displacement output. Consequently, deformation of the inspection object, such as projection/hollow of a pin of an IC chip, excess and deficiency of a solder amount, projection/hollow of a contact of a connector, can be inspected simultaneously with the electrical inspection of the inspection object. COPYRIGHT: (C)2010,JPO&INPIT
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