发明名称 |
SYSTEMS AND METHODS FOR FABRICATING AN OUT-OF-PLANE MEMS STRUCTURE |
摘要 |
System and methods offset mechanism elements during fabrication of Micro-Electro-Mechanical Systems (MEMS) devices. An exemplary embodiment applies a voltage across an offset mechanism element and a bonding layer of a MEMS device to generate an electrostatic charge between the offset mechanism element and the bonding layer, wherein the electrostatic charge draws the offset mechanism element to the bonding layer. The offset mechanism element and the bonding layer are then bonded.
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申请公布号 |
US2009321008(A1) |
申请公布日期 |
2009.12.31 |
申请号 |
US20080163277 |
申请日期 |
2008.06.27 |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
FOSTER MICHAEL;ZHOU SHIFANG |
分类号 |
B32B37/14 |
主分类号 |
B32B37/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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