| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveyance traveling vehicle capable of maintaining the accuracy of a vertical movement amount even if machines have structural variations and members have individual differences. SOLUTION: The ceiling traveling vehicle 5 conveys a FOUP (Front Opening Unified Pod) 4 to a predetermined area and includes a travel section, a hold section 60 and a vertical movement section 61. The travel section travels along a rail 3. The hold section 60 holds the FOUP 4. The vertical movement section 61 includes a belt 59 suspending the hold section 60. The vertical movement section 61 is mounted to the travel section and vertically moves the hold section 60. The belt 59 has a scale. The vertical movement section 61 measures a vertical movement position of the hold section 60 based on the scale of the belt 59. COPYRIGHT: (C)2010,JPO&INPIT
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