发明名称 WASHING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a washing device which is capable of reusing substitution gas for substituting the gas in a washing tank. <P>SOLUTION: A washing system 1 washes objects 500 to be washed by supercritical carbon dioxide or liquid state carbon dioxide. The washing system 1 is provided with a washing tank 310 for accommodating the objects 500, a supply tube 330 for supplying gas including the substitution gas to be substituted with the gas in the washing tank 310 into the washing tank 310, a discharge tube 340 for discharging the mixed gas including the substitution gas and the gas inside the washing tank 310 from the washing tank 310, and a returning channel 370 which is connected with the discharge tube 340 and the supply tube 330 for returning the mixed gas discharged from the discharge tube 340 to the washing tank 310 via the supply tube 330. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009279117(A) 申请公布日期 2009.12.03
申请号 JP20080132848 申请日期 2008.05.21
申请人 SHARP CORP 发明人 KATO YASUAKI
分类号 D06F43/08;B08B7/00 主分类号 D06F43/08
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