CAPACITIVE PRESSURE SENSOR AND A METHOD FOR FABRICATING THE SAME
摘要
<p>Disclosed are a capacitive pressure sensor having a conductive plug buried in a lower substrate and a method for fabricating the same. A pressure sensor comprises: an upper structure, which includes a diaphragm in a changeable shape depending on the difference between a reference pressure and a measured pressure and a chamber under the reference pressure; and a lower structure, which is connected to the upper structure and includes a via hole for transferring the measured pressure to the diaphragm and a conductive plug for transferring a change in the shape of the diaphragm as an electric signal. As a result, the surface area for forming pads can be reduced.</p>
