METHOD FOR MANUFACTURING THIN FILM CUT APART BY GAP AND METHOD FOR MANUFACTURING DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a new manufacturing method of a thin film having a gap (nano gap) of a width smaller than 1μm. SOLUTION: On a fiber (nano fiber) 2 having a diameter smaller than 1μm disposed on a substrate 1 and on a surface of the substrate 1 adjacent to the fiber 2, a material 3 constituting the thin film is deposited and the fiber 2 is removed together with the thin film material 3 deposited thereon to form a nano gap 5. A fiber manufactured in advance by an electro-spinning method may be used as the fiber 2. More specifically, if an original fiber is so manufactured as to bridge two collectors which are disposed apart and a distance between the two collectors is so widened as to stretch the original fiber and narrow its diameter, it is possible to obtain the nano fiber having a uniform diameter. COPYRIGHT: (C)2010,JPO&INPIT