| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a dry air supplying apparatus which can stably obtain the dry air of low dew point, and can be made small in size and simple in constitution. <P>SOLUTION: The dry air supplying apparatus 11 is serially provided with a polymer membrane type dryer 15 for spare dehumidifying supplied with humid air from an air source 12, and a polymer membrane type dryer 16 for main dehumidifying. The dry air supplying apparatus 11 is provided with first and second pressure reducing valves 23, 24 reducing the pressure of dry air from the polymer membrane type dryer 16 for main dehumidifying at the downstream thereof. The dry air supplying apparatus 11 supplies the dry air obtained from the polymer membrane type dryer 16 for main dehumidifying to all the polymer membrane type dryers 15, 16 directly and individually for regeneration of a porous hollow fiber membrane. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
