| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compact grinding device capable of performing grinding work from coarse grinding to finish grinding by one grinding means. <P>SOLUTION: The grinding device includes a holding table for holding a workpiece, the grinding means for grinding the workpiece held on the holding table, and a grinding means feeding mechanism for moving the grinding means in a direction approaching or separating from the workpiece. The grinding means includes a porous pad having a large number of pores that face the workpiece held on the holding table, a gel-like slurry storing portion provided on an upper part of the porous pad and storing the gel-like slurry therein, and a water supply means for supplying water between the porous pad and the workpiece. The porous pad contains super abrasive grains at least on its outer peripheral part, a pore diameter of the porous pad being larger than that of the super abrasive grains contained in the gel-like slurry. <P>COPYRIGHT: (C)2010,JPO&INPIT |
