| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser processing head and laser processing apparatus capable of homogenizing an incident heat distribution caused by plural laser light rays at a focus position of laser light and a defocus position in the vicinity of the focus position.SOLUTION: In a first optical system 3, when plural laser light rays Ls are divided into plural first laser light groups in a Y-axis direction, the positions of the optical axes of the laser light rays La of the first laser light groups are deviated from one another in a Z-axis direction. In a second optical system 4, when plural laser light rays La are divided into plural second laser light groups associated with the first laser light groups, the second laser light groups are superposed on one another, and the positions of the optical axes of the laser light rays La of the second laser light groups that are superposed on one another are deviated from one another in the Y-axis direction. In a third optical system 5, when plural laser light rays La are divided into plural third laser light groups in the Z-axis direction, the positions of the optical axes of the laser light rays La of the third laser light groups are deviated from one another in the Y-axis direction.SELECTED DRAWING: Figure 2 |
