| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance the accuracy of D-A conversion higher than that of a resolution of a device, and to improve the accuracy of positioning. <P>SOLUTION: A positioning control unit 120 controls the positioning of a stage, and includes: an operation amount calculation part 121 which calculates an operation amount per control cycle; an output control part 123 which outputs a prescribed resolution by dividing the calculated operation amount in terms of time so that integrated values per control cycle become equal; and a D-A conversion part 124 which converts the output operation amount into an analog signal from a digital signal by the prescribed resolution. The positioning control unit controls the positioning of the stage by driving a piezoelectric element by the analog signal. By this, the accuracy of the D-A conversion can be enhanced higher than that of the resolution of the device, and the accuracy of the positioning can be improved. <P>COPYRIGHT: (C)2010,JPO&INPIT |
